Cryogenics Quantum Lab:

Equipped with:

• Bluefors SD dilution cryostat. Base Temperature: 20 mK
• Wide range of RF test instruments for superconducting quantum device characterization

CAMCOR Fabrication and Processing Labs:

Students have access and utilize the CAMCOR Microfabrication and Characterization Facility, which includes:

• Photolithography: MicroTech Direct Laser Writer (405 nm), Suss MicroTec Mask Aligner, Photoresist Spinner and developper/stripper wet bench.
• Etching: Oxford ICP Reactive Ion Etcher, Wet etch benches
• Angstrom Engineering sputter coater, e-Beam and thermal evaporator systems
• Zeiss Scanning Electron Microscope with e-Beam lithography capability
• Surface profilometer and thin film ellipsometer

Students also utilize the CAMCOR Surface Analytical Facility. Students in particular get proficient and have access to Bruker FastScan Atomic Force Microscope.

CAMCOR also includes a co-working space with shared computer lab.

Optical Teaching Lab Space:

Optical Teaching Lab space is shared with the KCGIP Optics track. Our program utilizes three parallel optical bays, which the students utilize to build their spin qubit optical measurement setup and perform ensemble and single spin qubit measurements.